Paper
22 May 1990 Deformable-Mirror Spatial Light Modulators
Larry J. Hornbeck
Author Affiliations +
Abstract
A brief overview of deformable-mirror spatial light modulator (SLM) technology is presented, followed by the first comprehensive review of the Texas Instruments deformable-mirror device (DMD), a subclass of deformable-mirror SLMs. The DMD architecture, fabrication, and operation (both analog and digital) are described. It is shown that amplitude-dominant or phase-dominant modulation is obtained by a simple modification of the pixel architecture. Representative DMD applications are presented.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Larry J. Hornbeck "Deformable-Mirror Spatial Light Modulators", Proc. SPIE 1150, Spatial Light Modulators and Applications III, (22 May 1990); https://doi.org/10.1117/12.962188
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CITATIONS
Cited by 223 scholarly publications and 185 patents.
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KEYWORDS
Digital micromirror devices

Electrodes

Analog electronics

Spatial light modulators

Modulation

Metals

Oxides

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