Investigations on LIDT of PIAD multilayer coatings prepared by conventional and plasma diagnostics based process control

Sina Malobabic; Jens Harhausen; Rüdiger Foest; Lars Mechold; Peter Awakowicz; Ralf Peter Brinkmann

doi:10.1117/12.2571103

11 September 2020 Investigations on LIDT of PIAD multilayer coatings prepared by conventional and plasma diagnostics based process control

Sina Malobabic, Jens Harhausen, Rüdiger Foest, Lars Mechold, Peter Awakowicz, Ralf Peter Brinkmann

Author Affiliations +

Proceedings Volume 11514, Laser-induced Damage in Optical Materials 2020; 1151413 (2020) https://doi.org/10.1117/12.2571103
Event: SPIE Laser Damage, 2020, Online Only

Abstract

Plasma ion assisted deposition (PIAD) is a common method for the production of high-end optical interference coatings (OIC). Conventional process control is based on operating parameters like gas fluxes, voltages or currents, while the actual state of the assist plasma is specified imprecisely. The concept of active plasma resonance spectroscopy (APRS) employing the Multipole Resonance Probe (MRP) allows to access plasma conditions in industrial coating environments. This study presents results on the investigation of conventional and APRS-based control concepts for a multilayer OIC, a 36-layer polarizer made of SiO2 and Ta2O5. Process repeatability and its impact on Laser Induced Damage Threshold (LIDT) are addressed.

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Sina Malobabic, Jens Harhausen, Rüdiger Foest, Lars Mechold, Peter Awakowicz, and Ralf Peter Brinkmann "Investigations on LIDT of PIAD multilayer coatings prepared by conventional and plasma diagnostics based process control", Proc. SPIE 11514, Laser-induced Damage in Optical Materials 2020, 1151413 (11 September 2020); https://doi.org/10.1117/12.2571103

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