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11 September 2020 Investigations on LIDT of PIAD multilayer coatings prepared by conventional and plasma diagnostics based process control
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Abstract
Plasma ion assisted deposition (PIAD) is a common method for the production of high-end optical interference coatings (OIC). Conventional process control is based on operating parameters like gas fluxes, voltages or currents, while the actual state of the assist plasma is specified imprecisely. The concept of active plasma resonance spectroscopy (APRS) employing the Multipole Resonance Probe (MRP) allows to access plasma conditions in industrial coating environments. This study presents results on the investigation of conventional and APRS-based control concepts for a multilayer OIC, a 36-layer polarizer made of SiO2 and Ta2O5. Process repeatability and its impact on Laser Induced Damage Threshold (LIDT) are addressed.
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© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sina Malobabic, Jens Harhausen, Rüdiger Foest, Lars Mechold, Peter Awakowicz, and Ralf Peter Brinkmann "Investigations on LIDT of PIAD multilayer coatings prepared by conventional and plasma diagnostics based process control", Proc. SPIE 11514, Laser-induced Damage in Optical Materials 2020, 1151413 (11 September 2020); https://doi.org/10.1117/12.2571103
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