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11 September 2020 Scalable and durable glass-engraved meta-surfaces for high power laser ultra-thin optics
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Abstract
We present a method for producing spatially patterned glass engraved meta-surfaces, which is scalable, has high mechanical stability and high laser damage durability, and thus promising for ultra-thin optics implementation for high-power lasers. The process is based on laser raster-scan of a thin metal film on a glass, followed by dry-etching and removal of the metal mask. We present fabricated structures, characterization of their optical performance, mechanical stability and laser damage performance.
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© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eyal Feigenbaum, Jae Hyuck Yoo, Nathan Ray, Hoang Nguyen, Mike Johnson, Salmaan Baxamusa, and Selim Elhadj "Scalable and durable glass-engraved meta-surfaces for high power laser ultra-thin optics", Proc. SPIE 11514, Laser-induced Damage in Optical Materials 2020, 1151417 (11 September 2020); https://doi.org/10.1117/12.2572230
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