Holistic lithography in the age of the Artificial Intelligence of Things

Martin van den Brink

doi:10.1117/12.2580424

21 September 2020 Holistic lithography in the age of the Artificial Intelligence of Things

Martin van den Brink

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Proceedings Volume 11517, Extreme Ultraviolet Lithography 2020; 1151702 (2020) https://doi.org/10.1117/12.2580424
Event: SPIE Photomask Technology + EUV Lithography, 2020, Online Only

Abstract

The convergence of 5G, artificial intelligence and billions of connected devices will start a new wave of innovation, bringing advanced computing power to massive amounts of data. This is the era of the Artificial Intelligence of Things. The key enabler continues to be affordable scaling, driven by advanced lithography, computational capabilities, fast metrology and inspection. In his keynote, ASML President and CTO Martin van den Brink will look at the key developments across ASML’s holistic product portfolio.

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Martin van den Brink "Holistic lithography in the age of the Artificial Intelligence of Things", Proc. SPIE 11517, Extreme Ultraviolet Lithography 2020, 1151702 (21 September 2020); https://doi.org/10.1117/12.2580424

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