Improvement of the spatial resolution of ion imaging system using thinned sensor substrate

Wataru Inami; Kiyohisa Nii; Satoru Shibano; Hikaru Tomita; Yohimasa Kawata

doi:10.1117/12.2573300

15 June 2020 Improvement of the spatial resolution of ion imaging system using thinned sensor substrate

Wataru Inami, Kiyohisa Nii, Satoru Shibano, Hikaru Tomita, Yohimasa Kawata

Proceedings Volume 11521, Biomedical Imaging and Sensing Conference 2020; 115210L (2020) https://doi.org/10.1117/12.2573300
Event: SPIE Technologies and Applications of Structured Light, 2020, Yokohama, Japan

Abstract

We proposed an addressable potentiometric sensor for ion imaging using a focused electron beam instead of the light. The electron beam can be easily focused to a spot of several nanometer, and it enable to improve the spatial resolution. The electron beam for imaging the ion concentration distribution is scattered in a sensor substrate and the spatial resolution is reduced. Therefore, it is necessary to reduce the scattering in order to realize a high spatial resolution. In order to reduce scattering, the acceleration voltage of the electron beam and the film thickness of the sensor substrate were examined.

Citation Download Citation

Wataru Inami, Kiyohisa Nii, Satoru Shibano, Hikaru Tomita, and Yohimasa Kawata "Improvement of the spatial resolution of ion imaging system using thinned sensor substrate", Proc. SPIE 11521, Biomedical Imaging and Sensing Conference 2020, 115210L (15 June 2020); https://doi.org/10.1117/12.2573300

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available