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15 June 2020 Improvement of the spatial resolution of ion imaging system using thinned sensor substrate
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Proceedings Volume 11521, Biomedical Imaging and Sensing Conference 2020; 115210L (2020) https://doi.org/10.1117/12.2573300
Event: SPIE Technologies and Applications of Structured Light, 2020, Yokohama, Japan
Abstract
We proposed an addressable potentiometric sensor for ion imaging using a focused electron beam instead of the light. The electron beam can be easily focused to a spot of several nanometer, and it enable to improve the spatial resolution. The electron beam for imaging the ion concentration distribution is scattered in a sensor substrate and the spatial resolution is reduced. Therefore, it is necessary to reduce the scattering in order to realize a high spatial resolution. In order to reduce scattering, the acceleration voltage of the electron beam and the film thickness of the sensor substrate were examined.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wataru Inami, Kiyohisa Nii, Satoru Shibano, Hikaru Tomita, and Yohimasa Kawata "Improvement of the spatial resolution of ion imaging system using thinned sensor substrate", Proc. SPIE 11521, Biomedical Imaging and Sensing Conference 2020, 115210L (15 June 2020); https://doi.org/10.1117/12.2573300
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