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15 June 2020 Silicon (111) chiral structures fabricated by illumination of optical vortex
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Proceedings Volume 11522, Optical Manipulation and Structured Materials Conference 2020; 1152219 (2020) https://doi.org/10.1117/12.2573778
Event: SPIE Technologies and Applications of Structured Light, 2020, Yokohama, Japan
Abstract
We investigate the structures on a silicon (111) substrate produced by illumination of optical vortex. The fabricated structures on silicon (111) exhibit polycrystalline properties associated with rather complicated 7×7 constructed surface.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ablimit Ablez, Katsuhiko Miyamoto, Ryuji Morita, and Takashige Omatsu "Silicon (111) chiral structures fabricated by illumination of optical vortex", Proc. SPIE 11522, Optical Manipulation and Structured Materials Conference 2020, 1152219 (15 June 2020); https://doi.org/10.1117/12.2573778
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