Design of a spectroscopic imaging ellipsometer

Lianhua Jin; Makoto Uehara; Yuki Iizuka; Eiichi Kondoh; Bernard Gelloz

doi:10.1117/12.2574762

15 June 2020 Design of a spectroscopic imaging ellipsometer

Lianhua Jin, Makoto Uehara, Yuki Iizuka, Eiichi Kondoh, Bernard Gelloz

Proceedings Volume 11523, Optical Technology and Measurement for Industrial Applications 2020; 115230H (2020) https://doi.org/10.1117/12.2574762
Event: SPIE Technologies and Applications of Structured Light, 2020, Yokohama, Japan

Abstract

Imaging ellipsometry (IE) possesses characteristics of both single-point measurement ellipsometry and optical microscopy. To obtain quantitative measurement, it is very important for design of the spectroscopic imaging ellipsometer to employ a correct imaging system, solve non-uniformities of optical components. Here, we introduce a reflection imaging system, measurement noises due to non-ideal optical components, and describe solutions of problems.

Citation Download Citation

Lianhua Jin, Makoto Uehara, Yuki Iizuka, Eiichi Kondoh, and Bernard Gelloz "Design of a spectroscopic imaging ellipsometer", Proc. SPIE 11523, Optical Technology and Measurement for Industrial Applications 2020, 115230H (15 June 2020); https://doi.org/10.1117/12.2574762

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