Recent advance on phase measuring deflectometry for obtaining 3D shape of specular surface

Zonghua Zhang; Caixia Chang; Xiaohong Liu; Yuemin Wang; Nan Gao; Zhaozong Meng

doi:10.1117/12.2572962

10 October 2020 Recent advance on phase measuring deflectometry for obtaining 3D shape of specular surface

Zonghua Zhang, Caixia Chang, Xiaohong Liu, Yuemin Wang, Nan Gao, Zhaozong Meng

Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 115520Z (2020) https://doi.org/10.1117/12.2572962
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

Phase measuring deflectometry (PMD) is a superior technique to obtain 3D shape information of specular surfaces because of its advantages of large dynamic range, non-contact operation, full-field measurement, fast acquisition, high precision and automatic data processing. This paper reviews the recent advance on PMD. First, the basic principle of PMD is introduced following several fringe reflection methods. Then, a direct PMD (DPMD) method is presented for measuring 3D shape of specular objects having discontinuous surfaces. The DPMD method builds the relationship between phase and depth data, without gradient integration procedure. Next, an infrared PMD (IR-PMD) method is reviewed to measure specular objects. Because IR light is used as a light source, the IR-PMD method is insensitive to the effect of ambient light and has high measurement accuracy. The following will analyze the effects of error sources, including nonlinear influence, lens distortion of imaging and projecting system, geometric calibration error, on the measurement results and evaluate the performance of the 3D shape measurement system. Finally, the future research directions of PMD will be discussed.

Conference Presentation

Citation Download Citation

Zonghua Zhang, Caixia Chang, Xiaohong Liu, Yuemin Wang, Nan Gao, and Zhaozong Meng "Recent advance on phase measuring deflectometry for obtaining 3D shape of specular surface", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 115520Z (10 October 2020); https://doi.org/10.1117/12.2572962

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