The design of 2D dynamic photoelectric microscope applied in the abbe comparator

Yutong Lu; Dawei Feng; Xiang Yang; Tingting Li; Xinyan Chi

doi:10.1117/12.2580627

5 November 2020 The design of 2D dynamic photoelectric microscope applied in the abbe comparator

Yutong Lu, Dawei Feng, Xiang Yang, Tingting Li, Xinyan Chi

Proceedings Volume 11567, AOPC 2020: Optical Sensing and Imaging Technology; 115674I (2020) https://doi.org/10.1117/12.2580627
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

High-precision line scale, as the benchmark of the dissemination of quantity in length measurement, is being widely used in processing and calibration of precision instruments. The key for tracing measurement of line scale templates is to achieve high-precision alignment of the linear ruler. In order to perform the traceable measurement of 2-D Line Scale templates, we designed a kind of 2-D dynamic photoelectric microscope that can realize high resolution aim at the crosswire. When the templates moves unidirectionally with uniform speed, the corresponding crosswire will be imaged in the two slits successively. Then the light signal is converted into an identical electrical signal by the photomultiplier tube. Finally using laser interferometer ambient parameter monitor and laser wavelength compensation , the high-precision calibration of 2- D line scale templates can be realized. The measurement uncertainty can reach U=(0.1+0.1L)μm（k=3,L：m).

Citation Download Citation

Yutong Lu, Dawei Feng, Xiang Yang, Tingting Li, and Xinyan Chi "The design of 2D dynamic photoelectric microscope applied in the abbe comparator", Proc. SPIE 11567, AOPC 2020: Optical Sensing and Imaging Technology, 115674I (5 November 2020); https://doi.org/10.1117/12.2580627

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