Simulation and polishing experiment of aspheric mirror with pre-filled surface figure

Huijun Wang; Jiyou Zhang; Yuming Zhou; Wen Guo; Ang Li

doi:10.1117/12.2579655

5 November 2020 Simulation and polishing experiment of aspheric mirror with pre-filled surface figure

Huijun Wang, Jiyou Zhang, Yuming Zhou, Wen Guo, Ang Li

Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 1156810 (2020) https://doi.org/10.1117/12.2579655
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

Smart robot polishing experiments of a reflective mirror are carried on in the paper to verify the pre-filling method. First, pre-filling method is used to simulate the surface figure of a zerodur mirror whose edge is out of the measuring scope of the Zygo interferometer partly in contrast to that of the original one. Second, the polished surface figures with different polishing depths are simulated in the paper to get the relatively right polishing depth of the mirror whose surface figure is processed with the pre-filling method. And at the same time, the polished surface figures with different polishing depths with the unfilled surface figure are also simulated by contrast. Third, smart robot polishing experiment is carried on to verify both the chosen polishing depth and the pre-filling method. Forth, the real surface figure of the mirror after polishing is calibrated. The measuring results show that the surface figure of the mirror after polishing is changed greatly in comparison of that of the mirror before polishing: the surface figure of the mirror before polishing is that the root-meansquare value (RMS value) is about0.374 λ (λ=632.8nm), and the edge is invisible partly, while the RMS value of the surface figure of the mirror after polishing is about0.231 λ, and the edge is visible. The convergence rate of RMS value is 38.2%. The experimental results show that pre-filling method can simulate rightly the surface figure of the aspheric mirror whose edge is out of the measuring scope of the Zygo interferometer.

Citation Download Citation

Huijun Wang, Jiyou Zhang, Yuming Zhou, Wen Guo, and Ang Li "Simulation and polishing experiment of aspheric mirror with pre-filled surface figure", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 1156810 (5 November 2020); https://doi.org/10.1117/12.2579655

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Surface finishing

Polishing

Mirrors

Aspheric optics

Interferometers

Aspheric lenses

Zernike polynomials

Show All Keywords

Keywords/Phrases

Search In:

Publication Years