28 December 1989 Development Of Large CCD Arrays With Enhanced UV Performance
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Abstract
In support of programs in surveillance, star tracking and the use of intensified sensors, a series of CCD activities were begun in 1984 by Science Applications International Corporation. They now include the 1989 company-funded development of 1024 x 1024, 18 micron pixel CCD's, benefiting from technology transfer from JPL, and fabricated for SAIC by Ford Aerospace. The result has been a most successful series of CCD's and continued SAIC investment in 1) augmentations of the original Multi-Pinned Phase (MPP) version, 2) the first wafer configuration and funding commitment for Open-Pinned-Phase (OPP) (invented by J. Janesick), and now the configuration of a variety of larger and smaller versions of 18 micron pixel MPP CCD's, to be operated with either front- or back-illumination. This paper surveys activities which are now leading toward reduced noise and toward improved visible region QE and toward the acquisition of UV/Xray responsivity coupled with the features of the MPP CCD's.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard H. Varian, A. Russell Schaefer, John Cover, James R. Janesick, Richard Bredthauer, "Development Of Large CCD Arrays With Enhanced UV Performance", Proc. SPIE 1158, Ultraviolet Technology III, (28 December 1989); doi: 10.1117/12.962549; https://doi.org/10.1117/12.962549
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