27 November 1989 Advances In Multilayer X-Ray/EUV Optics: Synthesis, Performance And Instrumentation
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Abstract
The field of multilayer optics for the X-ray, Soft X-ray and extreme ultra violet is maturing at a rapid pace. There are more than fourty groups worldwide actively working in this area. A large part of these efforts are directed to improving the quality of multilayer structures by developing a better understanding of the synthesis-structure-property relationships. Although the quality of multilayer structures may be substantially improved there are now significant instruemental apllications for these reflecting optics. In this paper the current status of this field is discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Troy W. Barbee, "Advances In Multilayer X-Ray/EUV Optics: Synthesis, Performance And Instrumentation", Proc. SPIE 1159, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics, (27 November 1989); doi: 10.1117/12.962618; https://doi.org/10.1117/12.962618
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