28 July 1989 Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion Polishing
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Abstract
The performance of multilayer x-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at λ = 64 and λ = 114Å and the reflectivity is increased by a factor of two in both cases. Accumulation of roughness during deposition is eliminated.
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Eberhard Spiller, Eberhard Spiller, } "Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion Polishing", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); doi: 10.1117/12.962651; https://doi.org/10.1117/12.962651
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