28 July 1989 The Soft X-Ray Performance Of Plane And Figured Ni-Ac Multilayer Mirrors
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Abstract
In multilayer assemblies consisting of alternating high and low absorption index materials the strongly absorbing (metal) component layer is usually microcrystalline. The crystallite size influences the soft X-ray reflectivity of the stack by determining the effective reflecting area of the stack and the diffuse scattering contribution. The influence of the deposition parameters on the structure of ion-beam sputtered Ni and a-C films is described together with the associated multilayer soft X-ray reflectivity spectra as a function of sputtering energy, d-spacing and film thickness ratio.
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Brian L. Evans, Ali M.H. Al -Arab, Shi Xu, "The Soft X-Ray Performance Of Plane And Figured Ni-Ac Multilayer Mirrors", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); doi: 10.1117/12.962641; https://doi.org/10.1117/12.962641
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