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22 December 1989 High Fill Factor 512 X 512 PtSi Focal Plane Array
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Abstract
A 512 x 512 monolithic PtSi Schottky Barrier Diode (SBD) array that was designed, fabricated and tested at EG&G Reticon will be discussed. The array uses a novel line-addressed charge-accumulation (LACA) CCD in an interline configuration for the vertical registers and a multiple-readout register for high speed readout. The LACA readout structure has two distinct advantages over the conventional interline CCD structure. First, the LACA register occupies a very small area while still providing enough charge handling capacity • for the Schottky barrier detector. As a result, the 30 gm x 30 gm pixels have a fill factor of 54% when designed with a 2.5 Lim minimum dimension CCD process. Secondly, since the register operates in a charge accumulation mode, it has an extremely high effective charge accumulation efficiency. In the horizontal register, four readout structures are used to increase the overall pixel readout rate. A 75 Hz frame rate is achieved when the horizontal clock rate is 5 MHz. A CCD bending structure is utilized at each output to eliminate any coupling from the common clock lines. Each output has an electron sensitivity of greater than 5 0/e. The quantum yield of the platinum silicide SBDs has been between 15 and 25%. The chip dimensions are 748 mil x 748 mil, of which 604 mil x 604 mil is photosensitive.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weng-Lyang Wang, Rusty Winzenread, Buon Nguyen, James J. Murrin, and Robert L. Trubiano "High Fill Factor 512 X 512 PtSi Focal Plane Array", Proc. SPIE 1161, New Methods in Microscopy and Low Light Imaging, (22 December 1989); https://doi.org/10.1117/12.962691
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