The design and performance of two very high resolution CCD imagers will be described. Both devices utilize a 7.5 micron pixel and are fabricated with three-level polysilicon to achieve high yield. Dynamic range, charge transfer efficiency, spectral response and successful imagery are demonstrated.
Richard A. Bredthauer,
"Very Large Area 2048 And 4096 CCD Image Sensors", Proc. SPIE 1161, New Methods in Microscopy and Low Light Imaging, (22 December 1989); doi: 10.1117/12.962689; https://doi.org/10.1117/12.962689