Recent advancements in atomic force microscopy

M. van Reijzen; M. Boerema; A. Kalinin; H. Sadeghian; C. Bozdog

doi:10.1117/12.2595426

22 February 2021 Recent advancements in atomic force microscopy

M. van Reijzen, M. Boerema, A. Kalinin, H. Sadeghian, C. Bozdog

Proceedings Volume 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV; 116112E (2021) https://doi.org/10.1117/12.2595426
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

Atomic Force Microscopy (AFM) topographic imaging has enabled semiconductor manufacturing research and development since early '90s. Unique strength over competing metrology techniques includes the potential for undistorted, local high resolution information. Comparatively slow throughput has traditionally limited high volume manufacturing (HVM) deployment. Here, we discuss the advantages of a multi-head AFM system with miniaturized high-speed SPMs working in parallel. In addition, we extend traditional AFM techniques to selective imaging and metrology of subsurface 3D structures and show a path to enabling Overlay metrology through opaque hard mask layers.

Conference Presentation

Citation Download Citation

M. van Reijzen, M. Boerema, A. Kalinin, H. Sadeghian, and C. Bozdog "Recent advancements in atomic force microscopy", Proc. SPIE 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 116112E (22 February 2021); https://doi.org/10.1117/12.2595426

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available