Author Affiliations +
Leeming Tu,1 Haydn Zhou,1 Erik Xiao,2 Jin Zhu,2 Cynthia Li,2 Ningqi Zhu,2 Xin Li,2 Jason Pei,2 Miao Bing,2 Seddy Chu,2 Kevin Huang,3 Bob Dong2
1Yangtze Memory Technologies Co., Ltd. (China)
2KLA Corp. (China)
3KLA Corp. (United States)