25 April 1990 Wavelength Scanning Interferometry For The Measurement Of Both Surface Shapes And Refractive Index Inhomogeneity
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Abstract
A wavelength scanning interferometer is proposed for measuring both the shapes of the front and the rear surfaces and the inhomogeneity of the refractive index of an optical parallel plate. To separate the superimposed interferograms generated with many wavefronts reflected from the plate, it is utilized the property of a wavelength scanning interferometry that the phase shift associated with wavelength shift is in proportion to the optical path difference of the interfering beams. By an experiment, the rms error of the measurement is shown to be less than 1/50 wavelength.
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Katsuyuki Okada, Jumpei Tsujiuchi, "Wavelength Scanning Interferometry For The Measurement Of Both Surface Shapes And Refractive Index Inhomogeneity", Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); doi: 10.1117/12.962766; https://doi.org/10.1117/12.962766
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