Carrier-Based Automatic Phase-Shift Method

H. M. Shi; J. Fang; F. L. Dai; G. C. Jin

doi:10.1117/12.962803

20 December 1989 Carrier-Based Automatic Phase-Shift Method

H. M. Shi, J. Fang, F. L. Dai, G. C. Jin

Author Affiliations +

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962803
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

A new phase-shift method based on the spatial phase modulated carrier fringe pattern is presented in this paper. The four phase-shifted fringe patterns, in which the phase differences between the adjacent pattern are n12, can be generated from only one fringe pattern, and all of the procedures can be done automatically. This method can be used in the condition of incoherent metrology and dynamic measurement.

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H. M. Shi, J. Fang, F. L. Dai, and G. C. Jin "Carrier-Based Automatic Phase-Shift Method", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962803

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