20 December 1989 Development Of An Automatic Focusing Mechanism For An Interference Microscope
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Abstract
An autofocus system has been developed for an interference microscope. The basic design tradeoffs and current specifications are described
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. K. Cohen, E. R. Cochran, J. D. Ayres, "Development Of An Automatic Focusing Mechanism For An Interference Microscope", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962815; https://doi.org/10.1117/12.962815
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