Effects Of The Optical Transfer Function In Surface Profile Measurements

E. L. Church; P. Z. Takacs

doi:10.1117/12.962806

20 December 1989 Effects Of The Optical Transfer Function In Surface Profile Measurements

E. L. Church, P. Z. Takacs

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962806
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The effects of the measurement transfer function in a Wyko-like profiling microscope have been explored analytically, and large attenuations found over the upper half Hof the optical bandpass. In the case of corrugated surfaces these effects can be eliminated using a universal inverse-filtering routine. In the case of isotropically-rough surfaces the effects are larger, and although restoration is possible, no universal filter exists.

Citation Download Citation

E. L. Church and P. Z. Takacs "Effects Of The Optical Transfer Function In Surface Profile Measurements", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962806

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