20 December 1989 Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information
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Abstract
One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John E. Greivenkamp, John E. Greivenkamp, Kevin G. Sullivan, Kevin G. Sullivan, Russell J. Palum, Russell J. Palum, } "Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962809; https://doi.org/10.1117/12.962809
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