High sensitivity transparent capacitive micromachined ultrasound transducer linear arrays for optical, photoacoustic and ultrasound imaging

Afshin Kashani Ilkhechi; Christopher Ceroici; Roger J. Zemp

doi:10.1117/12.2578919

5 March 2021 High sensitivity transparent capacitive micromachined ultrasound transducer linear arrays for optical, photoacoustic and ultrasound imaging

Afshin Kashani Ilkhechi, Christopher Ceroici, Roger J. Zemp

Author Affiliations +

Proceedings Volume 11642, Photons Plus Ultrasound: Imaging and Sensing 2021; 116421Z (2021) https://doi.org/10.1117/12.2578919
Event: SPIE BiOS, 2021, Online Only

Abstract

We introduce transparent TOBE CMUT arrays for multimodal optical camera imaging, ultrasound imaging and photoacoustic imaging. We used an adhesive wafer bonding process technique to fabricate the 128-element lambda-pitch transducers and achieve high transparency ranging from visible to near-infrared with ultrasound center frequencies of 7.5-9 MHz. The arrays are anticipated to have utility for endoscopic, intravascular, and intra-operative probes for multimodal interventional guidance.

Conference Presentation

Citation Download Citation

Afshin Kashani Ilkhechi, Christopher Ceroici, and Roger J. Zemp "High sensitivity transparent capacitive micromachined ultrasound transducer linear arrays for optical, photoacoustic and ultrasound imaging", Proc. SPIE 11642, Photons Plus Ultrasound: Imaging and Sensing 2021, 116421Z (5 March 2021); https://doi.org/10.1117/12.2578919

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