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2 January 1990 Bidirectional Reflectance Distribution Function (BRDF) Measurements On Multilayer Dielectric Coatings As A Function Of Polarization State
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Abstract
BRDF measurements, as a function of polarization state, have been performed on well-polished optical surfaces using an automated scatterometer. The samples were polished to surface roughnesses of less than. 5 Angstroms rms and overcoated with various multilayer dielectric coatings for high reflectance at 6328 Angstroms. The polarization state of the input beam was selectable between p and s and the polarization state of the scattered light was determined using an analyzer at the detector. Measurements were taken from 90 degrees to the surface normal to within 0.5 degree from the specular reflection for several angles of incidence. BRDF is plotted for all combinations of input and scattered polarization states with instrument signature removed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. J. Schroeder, D. J. Musinski, C. G. Hull-Allen, and F. J. Van Milligen "Bidirectional Reflectance Distribution Function (BRDF) Measurements On Multilayer Dielectric Coatings As A Function Of Polarization State", Proc. SPIE 1165, Scatter from Optical Components, (2 January 1990); https://doi.org/10.1117/12.962856
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