2 January 1990 Scattering From Contaminated Surfaces
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Abstract
Ten surfaces were exposed to a variety of clean-room environments. Particle distributions were measured by a washing technique and BRDF curves were obtained. Correlations (and lack thereof) between the two sets of data are given.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kie Nahm, Kie Nahm, Paul R. Spyak, Paul R. Spyak, William L. Wolfe, William L. Wolfe, } "Scattering From Contaminated Surfaces", Proc. SPIE 1165, Scatter from Optical Components, (2 January 1990); doi: 10.1117/12.962858; https://doi.org/10.1117/12.962858
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