25 January 1990 Ellipsometers For Spectral Scans Of Psi And Delta Using A Single Polarizing Element
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Abstract
Most ellipsometers are based on the use of high-grade polarizers and accurately-calibrated retarders. An ellipsometer capable of making measurements using less-than-perfect polarizers and uncalibrated retarders has been developed. The instrument uses a single-polarizing element which can be a simple sheet polarizer for the visible range or a wire-grid polarizer for the infrared range. Accurate values of psi and delta can be obtained with an imperfect polarizing element if it is properly characterized at the working wavelength. The instrument uses an incandescent source and a filter or grating monochromator. It is well suited for measurements of the wavelength dependence of psi and delta of multilayer-coated reflectors. The working elements of the ellipsometer are rotated through fixed-angle settings and signal amplitudes are measured. The paper describes the instrument and gives calculations for both perfect and imperfect polarizing elements.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erik W. Anthon, Erik W. Anthon, } "Ellipsometers For Spectral Scans Of Psi And Delta Using A Single Polarizing Element", Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); doi: 10.1117/12.962898; https://doi.org/10.1117/12.962898
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