25 January 1990 Error Analysis For Anisotropic Compensator Defects For Null Ellipsometry
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Abstract
For null ellipsometry, error equations for polarizer and analyzer angles are formulated in terms of the anisotropic defect parameters of the compensator. Errors of δ ψ and δ Δ for dielectric samples are about the same as those for the straight-through case. Explicit analytical solutions of 8v and So for metallic samples are derived in terms of the anisotropic retardations with large deviations from quarter-wave. The analytical solutions agree with the results obtained from the direct computer simulation of the null ellipsometer as well as with the numerical solutions for the error equations.
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Soe-Mie F. Nee, Soe-Mie F. Nee, } "Error Analysis For Anisotropic Compensator Defects For Null Ellipsometry", Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); doi: 10.1117/12.962895; https://doi.org/10.1117/12.962895
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