The development of low losses all - dielectric laser reflector is essential for powerful excimer lasers in UV and VUV. The excimer laser reflectors at wavelengths of 351nm( Xen , 308nm( XeC1) and 193nm ( ArF) consisted of Zr02 - Y203/Si02 and A1203/Si02 have been prepared. The reflectance in such reflectors reaches 99. 7% at wavelength of 351nm, 99. 5% at 308nm, and 98% at 193nm. And the laser in-duced damage threshold has been raised to around 8. 5J/cm2 at wavelength of 308nm.