25 January 1990 Excimer Laser Reflectors
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Abstract
The development of low losses all - dielectric laser reflector is essential for powerful excimer lasers in UV and VUV. The excimer laser reflectors at wavelengths of 351nm( Xen , 308nm( XeC1) and 193nm ( ArF) consisted of Zr02 - Y203/Si02 and A1203/Si02 have been prepared. The reflectance in such reflectors reaches 99. 7% at wavelength of 351nm, 99. 5% at 308nm, and 98% at 193nm. And the laser in-duced damage threshold has been raised to around 8. 5J/cm2 at wavelength of 308nm.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peifu Gu, Peifu Gu, Jinfa Tang, Jinfa Tang, } "Excimer Laser Reflectors", Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); doi: 10.1117/12.962924; https://doi.org/10.1117/12.962924
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