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CyberOptics will be demonstrating the Airborne Particle Sensor™ (APSRQ) that quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14µm within process equipment and automated material handling systems. We will also be demonstrating the new In-Line Particle Sensor™ (IPS), an extension of the industry-leading APS sensing technology. The In-Line Particle Sensor with CyberSpectrum™ software detects particles in gas and vacuum lines 24/7 in semiconductor process equipment. The IPS quickly identifies, monitors and enables troubleshooting of particles down to 0.1μm. CyberOptics’ ReticleSense® Auto Multi Sensor™ (AMSR) measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device. The AMSR can capture multiple measurements in all locations – providing yet another way to increase yield and reduce downtime in semiconductor environments.
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