Design And Performance Of A High Resolution, High Accuracy Automatic Autocollimator.

W. Duis; J. Trede; G.-J. Ulbrich; M. Mross

doi:10.1117/12.962951

9 November 1989 Design And Performance Of A High Resolution, High Accuracy Automatic Autocollimator.

W. Duis, J. Trede, G.-J. Ulbrich, M. Mross

Proceedings Volume 1167, Precision Engineering and Optomechanics; (1989) https://doi.org/10.1117/12.962951
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Moller-Wedel has developed a very high accuracy angle measuring instrument. The angular resolution of the instrument exceeds 0.005 arcsec (-25 nano-radians). The repeatibility and absolute accuracy are in the 50 nano-radian range. The measuring range is at least 300 arcsec (-1.5 millirad). The instrument utilizes a linear CCD array with patented processessing techniques to determine the position of the return collimator image. The image is produced by an optimized optical system which projects a slit illuminated by light emitting diodes. High accuracy and stability also require thermal compensation in the opto-mechanic design of the instrument.

Citation Download Citation

W. Duis, J. Trede, G.-J. Ulbrich, and M. Mross "Design And Performance Of A High Resolution, High Accuracy Automatic Autocollimator.", Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); https://doi.org/10.1117/12.962951

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