Silicon-Based Micromechanical Structures And Devices

K. J. Gabriel; F. Behi; R. Mahadevan; J. A. Walker; M. Mehregany

doi:10.1117/12.962935

9 November 1989 Silicon-Based Micromechanical Structures And Devices

K. J. Gabriel, F. Behi, R. Mahadevan, J. A. Walker, M. Mehregany

Proceedings Volume 1167, Precision Engineering and Optomechanics; (1989) https://doi.org/10.1117/12.962935
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Integrated polysilicon mechanisms have received considerable attention in recent literature as a common technology to fabricate microdynamics systems [1],[2],[3],[4],[5]. Inherent in that attention is the recognition that these structures will operate at considerable speeds for reasonably long periods. To date however, little is known about the dynamic properties- most notably the friction and wear, of the structural materials used to fabricate such micromechanical structures. Furthermore, a critical need in the continued development of silicon-based micromechanical systems are forms of actuation which are compatible with both the materials and processing technology of silicon microelectronics. Actuation would ideally be powered and controlled electrically to fully exploit the potential of integrated, micro electromechanical systems. We describe a series of experiments, in situ measurements and theoretical models designed to provide estimates of the coefficients of friction and the nature of wear in integrated polysilicon micromechanisms. In addition, a method for the measurement of residual stress, Young's modulus, and fatigue in thin films under tension using surface micromachined electric microactuators is presented. Among the features of this technique is a suspended rotor, linear electrostatic actuator and the availability of a continuously varying load, providing the potential for performing dynamic studies. The force generated by an electric microactuator is used to produce mechanical deformations in the material of interest. The design, fabrication, and experimental results on a specific device for the study of BTDA-ODA/MPDA polyimide films are discussed.

Citation Download Citation

K. J. Gabriel, F. Behi, R. Mahadevan, J. A. Walker, and M. Mehregany "Silicon-Based Micromechanical Structures And Devices", Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); https://doi.org/10.1117/12.962935

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