Micro-optical-electro-mechanical systems (MOEMS) sensors based on cavity optomechanics

Ying Lia Li

doi:10.1117/12.2577184

20 April 2021 Micro-optical-electro-mechanical systems (MOEMS) sensors based on cavity optomechanics

Ying Lia Li

Proceedings Volume 11672, Laser Resonators, Microresonators, and Beam Control XXIII; 116720O (2021) https://doi.org/10.1117/12.2577184
Event: SPIE LASE, 2021, Online Only

Abstract

The coupling between mechanical motion and optical fields can be exploited for exquisite force sensing. This optomechanical interaction is further amplified with optical resonances, leading to unprecedented displacement sensitivities beyond 10^-18 m/Hz ^1/2, as exemplified by the Laser Interferometer Gravitational Wave Observatory (LIGO). In this talk I will introduce a cavity optomechanics platform for motion sensing based on optical whispering gallery mode (WGM) resonances. I will describe the evolution of a WGM accelerometer from the laboratory to a hand-fabricated proof-of-concept prototype, and now, towards chip-scale fabrication. Our goal is to reach acceleration sensitivities below 100 ng/Hz^1/2 (where g=9.81 ms^-2) whilst ensuring low power operation, high linearity, and low drift. Through the lens of commercial feasibility, we use finite element modelling to simulate the optical, mechanical, and thermal behaviour of a range of MOEMS designs. Preliminary results from chip fabrication and chip-testing will also be presented.

Conference Presentation

Citation Download Citation

Ying Lia Li "Micro-optical-electro-mechanical systems (MOEMS) sensors based on cavity optomechanics", Proc. SPIE 11672, Laser Resonators, Microresonators, and Beam Control XXIII, 116720O (20 April 2021); https://doi.org/10.1117/12.2577184

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