Formation of sub-100-nm periodic nanostructure on DLC with few-cycle laser pulses at low fluence

Yuto Iida; Godai Miyaji

doi:10.1117/12.2577144

5 March 2021 Formation of sub-100-nm periodic nanostructure on DLC with few-cycle laser pulses at low fluence

Yuto Iida, Godai Miyaji

Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 116730P (2021) https://doi.org/10.1117/12.2577144
Event: SPIE LASE, 2021, Online Only

Abstract

We report that few-cycle laser pulses at low fluence can produce sub-100 nm periodic nanostructures on DLC surfaces through nanoablation induced by short-range surface plasmon polaritons (SR-SPPs). The 7-fs and 100-fs laser pulses from Ti:sapphire lasers were used. The period of the nanostructures with 7-fs pulses was much smaller than those with 100-fs pulses. The Raman spectrum showed that the modified layer in a DLC surface irradiated with 7-fs pulses was thinner than that with 100-fs. By using a model target, the period calculated for the excitation of SR-SPPs was in good agreement with that in the experiments.

Conference Presentation

Citation Download Citation

Yuto Iida and Godai Miyaji "Formation of sub-100-nm periodic nanostructure on DLC with few-cycle laser pulses at low fluence", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 116730P (5 March 2021); https://doi.org/10.1117/12.2577144

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