22 December 1989 Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator
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Abstract
In t he paper. we have empha ii cal l y anal yzed and deduced a group of error formulas of measure' ng p1 oneness for large terrace by di agonal method from the pri nci pi e of unequal accuracy. 1 is accuracy i is hi gh. Old error formulas that are anal yzed and deduced from the equal act uracy have further been devel oped. At the same t i me, we have al so anal yzed I he accuracy of measuri ng planeness for 1 arge terrace by least area method and1 t dree-point method.
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Han Sen, Han Sen, Yang Daren, Yang Daren, Li Xueyuan, Li Xueyuan, } "Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator", Proc. SPIE 1168, Current Developments in Optical Engineering and Commercial Optics, (22 December 1989); doi: 10.1117/12.963003; https://doi.org/10.1117/12.963003
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