22 December 1989 Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator
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Abstract
In t he paper. we have empha ii cal l y anal yzed and deduced a group of error formulas of measure' ng p1 oneness for large terrace by di agonal method from the pri nci pi e of unequal accuracy. 1 is accuracy i is hi gh. Old error formulas that are anal yzed and deduced from the equal act uracy have further been devel oped. At the same t i me, we have al so anal yzed I he accuracy of measuri ng planeness for 1 arge terrace by least area method and1 t dree-point method.
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Han Sen, Han Sen, Yang Daren, Yang Daren, Li Xueyuan, Li Xueyuan, "Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator", Proc. SPIE 1168, Current Developments in Optical Engineering and Commercial Optics, (22 December 1989); doi: 10.1117/12.963003; https://doi.org/10.1117/12.963003
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