22 December 1989 Planar Integration Of Free-Space Optical Components
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In complex optical systems comprising many individual components, the alignment of these components becomes a severe problem, especially if the alignment tolerances are in the micron or submicron range. In order to solve this problem, we describe an approach which uses a combination of diffractive and reflective optical elements which are arranged on a planar quartz glass substrate. The propagation of the light signal follows a zigzag path within the substrate. The components are all fabricated simultaneously by means of planar techniques such as photolithography, etching, deposition etc.. Their relative positioning is achieved by generating a mask (or several masks) with an electron-beam writer.
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Jurgen Jahns, Jurgen Jahns, } "Planar Integration Of Free-Space Optical Components", Proc. SPIE 1168, Current Developments in Optical Engineering and Commercial Optics, (22 December 1989); doi: 10.1117/12.962996; https://doi.org/10.1117/12.962996

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