Ti-contacted halide-assisted CVD grown WSe2 monolayers for high performance photodetectors

Kishan Jayanand; Avra S. Bandyopadhyay; Anupama B. Kaul

doi:10.1117/12.2578915

5 March 2021 Ti-contacted halide-assisted CVD grown WSe₂ monolayers for high performance photodetectors

Kishan Jayanand, Avra S. Bandyopadhyay, Anupama B. Kaul

Proceedings Volume 11680, Physics and Simulation of Optoelectronic Devices XXIX; 116800W (2021) https://doi.org/10.1117/12.2578915
Event: SPIE OPTO, 2021, Online Only

Abstract

Transition metal dichalcogenides (TMDCs) have received a great deal of attention from the scientific community since the advent of graphene. Tungsten diselenide (2H-WSe₂) has particularly drawn-out attention of researchers because of its broadband spectral detection range. In this work, we have reported a halide assisted chemical vapor deposition (HA-LPCVD) technique for synthesis of large crystallites of 2H-WSe₂ with high crystalline perfection. The average crystallite size of synthesized 2H-WSe₂ was in the order of ~20 μm. We have reported device 2H-WSe₂ device fabrication using poly (methyl methacrylate) and electron beam lithography process to define titanium (Ti) metal contacts. A temperature (T) dependent analysis of the electronic transport reported here reveals a T-dependent conduction process existing at the interface of Ti and 2H-WSe₂ and an interfacial barrier height of ~ 0.35 eV was calculated at the thermionic emission regime. From the reported optoelectronic characterization, an on-off ratio (I_on/I_off) of ~9 was calculated. Furthermore, a responsivity (ℜ) of ~ 242 A/W was calculated for our 2H-WSe₂ based photodetector under broadband light excitation. The reported photodetector figures of merit will open avenues for use of monolayer 2H-WSe₂ with Ti metal contacts for high performance photodetection.

Conference Presentation

Citation Download Citation

Kishan Jayanand, Avra S. Bandyopadhyay, and Anupama B. Kaul "Ti-contacted halide-assisted CVD grown WSe₂ monolayers for high performance photodetectors", Proc. SPIE 11680, Physics and Simulation of Optoelectronic Devices XXIX, 116800W (5 March 2021); https://doi.org/10.1117/12.2578915

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