13 February 1990 Silicon-Etalon Fiber-Optic Temperature Sensor
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A temperature sensor is described which consists of a silicon etalon that is sputtered directly onto the end of an optical fiber. A two-layer protective cap structure is used to improve the sensor's long-term stability. The sensor's output is wavelength encoded to provide a high degree of immunity from cable and connector effects. This sensor is extremely compact and potentially inexpensive.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Glenn Beheim, Glenn Beheim, Klaus Fritsch, Klaus Fritsch, Joseph M. Flatico, Joseph M. Flatico, Massood Tabib Azar, Massood Tabib Azar, } "Silicon-Etalon Fiber-Optic Temperature Sensor", Proc. SPIE 1169, Fiber Optic and Laser Sensors VII, (13 February 1990); doi: 10.1117/12.963069; https://doi.org/10.1117/12.963069

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