Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Stefan T. Ilie; Thalia Domínguez Bucio; Teerapat Rutirawut; Lorenzo Mastronardi; Ilias Skandalos; Harold Chong; Frederic Y. Gardes

doi:10.1117/12.2578251

5 March 2021 Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Stefan T. Ilie, Thalia Domínguez Bucio, Teerapat Rutirawut, Lorenzo Mastronardi, Ilias Skandalos, Harold Chong, Frederic Y. Gardes

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Proceedings Volume 11690, Smart Photonic and Optoelectronic Integrated Circuits XXIII; 1169005 (2021) https://doi.org/10.1117/12.2578251
Event: SPIE OPTO, 2021, Online Only

Abstract

Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element - 2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35°x 17°) and an angular resolution of (0.15°x1.2°).

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Stefan T. Ilie, Thalia Domínguez Bucio, Teerapat Rutirawut, Lorenzo Mastronardi, Ilias Skandalos, Harold Chong, and Frederic Y. Gardes "Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays", Proc. SPIE 11690, Smart Photonic and Optoelectronic Integrated Circuits XXIII, 1169005 (5 March 2021); https://doi.org/10.1117/12.2578251

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