Optomechanical ultrasound sensors in silicon photonics

Wouter J. Westerveld; Md. Mahmud-Ul-Hasan; Cedric Pieters; Roelof A. Jansen; Simone Severi; Veronique Rochus; Xavier Rottenberg

doi:10.1117/12.2576672

5 March 2021 Optomechanical ultrasound sensors in silicon photonics

Wouter J. Westerveld, Md. Mahmud-Ul-Hasan, Cedric Pieters, Roelof A. Jansen, Simone Severi, Veronique Rochus, Xavier Rottenberg

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Proceedings Volume 11691, Silicon Photonics XVI; 116910H (2021) https://doi.org/10.1117/12.2576672
Event: SPIE OPTO, 2021, Online Only

Abstract

Future applications of ultrasound and photoacoustic imaging require a matrix of small and sensitive ultrasound sensors with read-out through a flexible cable. Silicon photonic ultrasound sensors have good prospects: small and sensitive sensors, wafer-scale fabrication, and matrix read-out via single optical fiber using photonic multiplexing. Here, we discuss different types of silicon photonic ultrasound sensors and their applications. This includes our optomechanical ultrasound sensor with extreme sensitivity that is achieved with an innovative optomechanical silicon photonic waveguide in an acoustical membrane. We discuss limitations of state-of-the-art piezoelectric sensors, how silicon photonic sensors overcome these, and applications in medical imaging.

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Citation Download Citation

Wouter J. Westerveld, Md. Mahmud-Ul-Hasan, Cedric Pieters, Roelof A. Jansen, Simone Severi, Veronique Rochus, and Xavier Rottenberg "Optomechanical ultrasound sensors in silicon photonics", Proc. SPIE 11691, Silicon Photonics XVI, 116910H (5 March 2021); https://doi.org/10.1117/12.2576672

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KEYWORDS

Sensors

Ultrasonography

Silicon photonics

Waveguides

Photoacoustic imaging

Optical fibers

Photoacoustic spectroscopy

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