150mm full wafer fabrication and characterization of 940nm emitting VCSELs for high-volume manufacture

David G. Hayes; Tomas Peach; Jack Baker; Sara-Jayne Gillgrass; Craig P. Allford; Angela Sobiesierski; Connie Eng; Saleem Shabbir; Stuart Thomas; Curtis Hentschel; Clive Meaton; Samuel Shutts; Aidan Daly; Tracy Sweet; Iwan Davies; Peter M. Smowton

doi:10.1117/12.2578592

5 March 2021 150mm full wafer fabrication and characterization of 940nm emitting VCSELs for high-volume manufacture

David G. Hayes, Tomas Peach, Jack Baker, Sara-Jayne Gillgrass, Craig P. Allford, Angela Sobiesierski, Connie Eng, Saleem Shabbir, Stuart Thomas, Curtis Hentschel, Clive Meaton, Samuel Shutts, Aidan Daly, Tracy Sweet, Iwan Davies, Peter M. Smowton

Author Affiliations +

Proceedings Volume 11704, Vertical-Cavity Surface-Emitting Lasers XXV; 1170406 (2021) https://doi.org/10.1117/12.2578592
Event: SPIE OPTO, 2021, Online Only

Abstract

High-volume low-cost production of vertical cavity surface emitting lasers (VCSELs) will allow their exploitation in new commodity markets. We report the successful scaling up from research level fabrication to produce oxide confined VCSELs across a whole 150mm wafer. On-wafer light-current-voltage (L-I-V) and spectral measurements are analyzed to determine the cross-wafer variations in threshold current, threshold current densities and emission wavelength, which is compared with reflectivity measurements taken immediately after growth. We examine the dependence of VCSEL performance on fabrication parameters over a range of device dimensions to assess whether variation arises from non-uniformity of the epitaxial material or wafer processing.

Conference Presentation

Citation Download Citation

David G. Hayes, Tomas Peach, Jack Baker, Sara-Jayne Gillgrass, Craig P. Allford, Angela Sobiesierski, Connie Eng, Saleem Shabbir, Stuart Thomas, Curtis Hentschel, Clive Meaton, Samuel Shutts, Aidan Daly, Tracy Sweet, Iwan Davies, and Peter M. Smowton "150mm full wafer fabrication and characterization of 940nm emitting VCSELs for high-volume manufacture", Proc. SPIE 11704, Vertical-Cavity Surface-Emitting Lasers XXV, 1170406 (5 March 2021); https://doi.org/10.1117/12.2578592

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available