Wavefront compensation for spatial light modulators based on Twyman-Green interferometry

M. Liebmann; J. Valverde; F. Kerbstadt

doi:10.1117/12.2583077

5 March 2021 Wavefront compensation for spatial light modulators based on Twyman-Green interferometry

M. Liebmann, J. Valverde, F. Kerbstadt

Proceedings Volume 11708, Advances in Display Technologies XI; 117080X (2021) https://doi.org/10.1117/12.2583077
Event: SPIE OPTO, 2021, Online Only

Conference Poster

Abstract

Spatial light modulators (SLM) based on liquid crystal on silicon (LCOS) are widely used for phase-related applications. The inherent aberrations such as curvature and liquid crystal thickness variation that are caused by the fabrication process may need to be compensated. Measuring the pixel dependent phase response, by means of a Twyman-Green interferometer at 640 nm, enables high precision calculation of compensation functions, leading to a wavefront flatness in the order of λ/11 (peak-to-peak). In this work we present the performance of the measurement setup, the 2D phase response of multiple LCOS panels and the results of active compensation of major aberration effects.

Conference Presentation

Citation Download Citation

M. Liebmann, J. Valverde, and F. Kerbstadt "Wavefront compensation for spatial light modulators based on Twyman-Green interferometry", Proc. SPIE 11708, Advances in Display Technologies XI, 117080X (5 March 2021); https://doi.org/10.1117/12.2583077

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