Research on process of optical elements coating planar layer

Ning Pei; Dasen Wang; Fengming Nie; Xiaojing Li; Hailin Guo; Xu Zhang; Chaoxiang Xia

doi:10.1117/12.2581905

15 January 2021 Research on process of optical elements coating planar layer

Ning Pei, Dasen Wang, Fengming Nie, Xiaojing Li, Hailin Guo, Xu Zhang, Chaoxiang Xia

Proceedings Volume 11761, Fourth International Conference on Photonics and Optical Engineering; 117611J (2021) https://doi.org/10.1117/12.2581905
Event: Fourth International Conference on Photonics and Optical Engineering, 2020, Xi'an, China

Abstract

In order to solve the problems of no uniform coating, edge coating, and severe coating defects in the process when processing 430mm×430mm optical components, The basic requirements of surface roughness data acquisition are analyzed and the application of inductive sensor in surface roughness is introduced. Optical element flattening layer coating and flow direction mechanisms, flattening layer material selection, and research on material characteristics and optical element planarization layer deposition process, achieving uniform coating of optical elements, reducing coating defects, and meeting the requirements of the next process polishing

Citation Download Citation

Ning Pei, Dasen Wang, Fengming Nie, Xiaojing Li, Hailin Guo, Xu Zhang, and Chaoxiang Xia "Research on process of optical elements coating planar layer", Proc. SPIE 11761, Fourth International Conference on Photonics and Optical Engineering, 117611J (15 January 2021); https://doi.org/10.1117/12.2581905

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