27 March 2021A scalable nanoimprint lithography process to manufacture diffractive optics and metalenses with high aspect ratio nanofeatures using high refractive index nanocrystals
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Vincent Einck,Jim Watkins,Amir Arbabi,Andrew McClung,Mahsa Torfeh, andMahdad Mansouree
"A scalable nanoimprint lithography process to manufacture diffractive optics and metalenses with high aspect ratio nanofeatures using high refractive index nanocrystals", Proc. SPIE 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II, 117650F (27 March 2021); https://doi.org/10.1117/12.2583145
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Vincent Einck, Jim Watkins, Amir Arbabi, Andrew McClung, Mahsa Torfeh, Mahdad Mansouree, "A scalable nanoimprint lithography process to manufacture diffractive optics and metalenses with high aspect ratio nanofeatures using high refractive index nanocrystals," Proc. SPIE 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II, 117650F (27 March 2021); https://doi.org/10.1117/12.2583145