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18 March 2021 Plasma properties measurements of parallel-plane electrodes in argon by coupling OES and PLIF
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Proceedings Volume 11780, Global Intelligent Industry Conference 2020; 1178016 (2021) https://doi.org/10.1117/12.2590211
Event: Global Intelligent Industry Conference 2020, 2020, Guangzhou, China
Abstract
Plasma properties are diagnosed in parallel-plane electrodes under 1-15 kPa within input power of 0-25 W by coupling Optical Emission Spectroscopy (OES) and Planar Laser-induced fluorescence (PLIF). Electron excitation temperature (Te), electron density (Ne) are obtained based on the intensities and broadenings of atomic and ionic spectral lines of argon. The spatial resolution of Te and Ne are measured by a high-precision setup based on fiber. At the gas pressure of 1 kPa, Te reaches maximum of 8.745×103 K while the peak of Ne appears in 15 kPa, is 3.237×1016 cm-3 . Besides, spatial distribution of 1s5 metastable atoms (ArM) with transition scheme 4s( 2P0 3/2)2 -4p ( P (2P0 1/2)1-4s(2P0 3/2)1 are revealed by PLIF, as a complementary of plasma properties. The number density of ArM also shows a larger number density in 15 kPa. Combined with OES, Te, Ne and number of ArM are higher around the surface of anode within discharge area. The current experimental results are demonstration of optimal plasma state under different external parameters and validation of relevant discharge models
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fangyi Wang, Shaohua Zhang, and Xilong Yu "Plasma properties measurements of parallel-plane electrodes in argon by coupling OES and PLIF", Proc. SPIE 11780, Global Intelligent Industry Conference 2020, 1178016 (18 March 2021); https://doi.org/10.1117/12.2590211
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