Engineered epsilon-near-zero metafilm with Ag-SiNx multilayer structure

Jimmy H. Ni

doi:10.1117/12.2593859

3 August 2021 Engineered epsilon-near-zero metafilm with Ag-SiNx multilayer structure

Jimmy H. Ni

Proceedings Volume 11795, Metamaterials, Metadevices, and Metasystems 2021; 117951A (2021) https://doi.org/10.1117/12.2593859
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

Abstract

In this summary, we report an experimental demonstration of a low-loss multilayer-based ENZ metafilm. The demonstrated ENZ metafilm consists of alternating layers of Ag and SiN. The optical properties, such as the effective plasma frequency and damping coefficients, of the demonstrated metafilm were controlled by changing the volume fraction of the metal layer. The measured effective permittivity values from an ellipsometry analysis show good agreement with the calculated results using a simple Maxwell-Garnett effective medium theory.

Conference Presentation

Citation Download Citation

Jimmy H. Ni "Engineered epsilon-near-zero metafilm with Ag-SiNx multilayer structure", Proc. SPIE 11795, Metamaterials, Metadevices, and Metasystems 2021, 117951A (3 August 2021); https://doi.org/10.1117/12.2593859

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