Phase measurement system for meta-lens

Mu-Ku Chen; Maoxiong Zhao; Ze-peng Zhuang; Yongfeng Wu; Xiaoyuan Liu; Yan Yue; Jingcheng Zhang; Jiaqi Yuan; Zhengnan Zhang; Shumin Xiao; Lei Shi; Jian-Wen Dong; Jian Zi; Din Ping Tsai

doi:10.1117/12.2594515

1 August 2021 Phase measurement system for meta-lens

Mu-Ku Chen, Maoxiong Zhao, Ze-peng Zhuang, Yongfeng Wu, Xiaoyuan Liu, Yan Yue, Jingcheng Zhang, Jiaqi Yuan, Zhengnan Zhang, Shumin Xiao, Lei Shi, Jian-Wen Dong, Jian Zi, Din Ping Tsai

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Proceedings Volume 11797, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XIX; 117970A (2021) https://doi.org/10.1117/12.2594515
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

Abstract

In recent years, Meta-lens has become a new type of optical device, showing excellent performance and novel applications. The nanoantennas of meta-lens can be used to control the phase, amplitude, and polarization at well. The phase part is the most important part of the function of the meta-lens. However, so far, the phase distribution of meta-lenses has not been directly measured, which further hinders the quantitative evaluation of their performance. We have developed an interferometric imaging phase measurement system for meta-lens and meta-devices. This system can measure the phase distribution by shooting the interference pattern. The phase distribution of meta-lenses can be measured to quantitatively characterize the imaging performance. Our meta-lens phase measurement system can help for designers to optimize the design, for manufacturers to identify defects, thereby improving the manufacturing process. This work will pave the way for meta-lens in industrial applications.

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Mu-Ku Chen, Maoxiong Zhao, Ze-peng Zhuang, Yongfeng Wu, Xiaoyuan Liu, Yan Yue, Jingcheng Zhang, Jiaqi Yuan, Zhengnan Zhang, Shumin Xiao, Lei Shi, Jian-Wen Dong, Jian Zi, and Din Ping Tsai "Phase measurement system for meta-lens", Proc. SPIE 11797, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XIX, 117970A (1 August 2021); https://doi.org/10.1117/12.2594515

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KEYWORDS

Phase measurement

Imaging systems

Manufacturing

Modulation transfer functions

Phase shift keying

Point spread functions

Interferometry

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